Soft X-ray Emissions by Sulfur Vapor Vacuum Discharges

Trans. Electrical Engineering in Japan, Vol. 110A, No. 11, pp.805-811, November 1990

Recently, in order to print patterns of ultra large scale integrated circuits, the demand for soft X-ray sources has become greater. A high current vacuum spark has a meritof flexibility in selection of characteristic X-ray materiel from the viewpoint of patterncontrast. Sulfur characteristic X-rays (0.4-0.52 nm) offer a range of suitable soft X-raysfor various mask materials, i.e. tantalum, tungsten, platinum and gold. In experiments,sulfur was put in a PTFE pipe which was set in the center of the anode. Soft X-ray emissionsresulted when a pulse current of about 150 kA flowed. The X-ray emission time from dischargeto production of a magnetic pinch was about 1 micro-second at various discharge currents.This time was short in comparison with the 2.4 micro-second rise time of the discharge current.Therefore the X-ray intensity should be enhanced by utilizing a fast rise time current.

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Hiroshi Arita (Hitachi Research Laboratory, Hitachi Ltd.)
Kouji Suzuki (Hitachi Research Laboratory, Hitachi Ltd.)
Yukio Kurosawa (Hitachi Research Laboratory, Hitachi Ltd.)
Kunio Hirasawa (Hitachi Research Laboratory, Hitachi Ltd.)
Yosio Watanabe (Hitachi Lighting Ltd.)

Summary’ń‹ź Ari-Enterprise

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