Soft X-Ray Emissions by High-Current Vacuum Discharges

IEEE Transactions on Plasma Science, Vol. 18, No. 42, pp.695-698, August 1990

Soft X-ray emissions by Z-pinch discharge between vacuum spark electrodes were examined. Mainly aluminum and molybdenum were utilized to generate soft X rays, and emissions resulted for pulse currents of about 150 kA. These emissions increased as the discharge current increased. A large X-ray intensity was obtained when using a spherical anode and a conical cathode. A stable spot plasma was produced for an electrode separation distance of 2 mm. For molybdenum, the X-ray emission of the 0.52-nm line and continuous X rays of 0.65-1.2 nm were observed. The X-ray continuum was believed to be due to recombination. For aluminum ally containing magnesium, the 0.62-, 0.66-, 0.72-, 0.78-, and 0.92-nm lines were observed. These experimental results indicate that vacuum spark is a potential exposure source for X-ray lithography.


Hiroshi Arita (Hitachi Research Laboratory, Hitachi Ltd.)
Kouji Suzuki (Hitachi Research Laboratory, Hitachi Ltd.)
Yukio Kurosawa (Hitachi Research Laboratory, Hitachi Ltd.)
Kunio Hirasawa (Hitachi Research Laboratory, Hitachi Ltd.)

Summary’ń‹ź Ari-Enterprise

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